Charged particle radiation apparatus

专利名称：Charged particle radiation apparatus发明人：Daisuke Mutou,Shuichi Nakagawa,Masaki

Mizuochi,Toshihiko Shimizu,HirofumiMotoshiromizu,Eisuke Kamide

申请号：US15251040申请日：20160830公开号：US09734983B2公开日：20170815

专利附图：

摘要：To provide a charged particle radiation apparatus including a soundproof coverthat highly realizes both suppression of image defects due to a specific frequency and

improvement in quake resistance. A charged particle radiation apparatus including a box-shaped soundproof cover having a plurality of wall surfaces, the soundproof coverincluding a plurality of columnar bodies forming a frame of the box shape body and abox-shaped acoustic energy absorbing structure provided in a connecting part of theplurality of columnar bodies and attached to support at least the two columnar bodies, isproposed.

申请人：Hitachi High-Technologies Corporation

地址：Minato-ku, Tokyo JP

国籍：JP

代理机构：Crowell & Moring LLP

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