Flow sensor, method of manufacturing the same and

专利名称：Flow sensor, method of manufacturing the

same and fuel cell system

发明人：Takeshi Fujiwara,Syo Sasaki,Kenichi

Nakamura,Tokudai Neda

申请号：US10036075申请日：20011227公开号：US06684694B2公开日：20040203

专利附图：

摘要：In a flow sensor, a heater is provided in the middle of an insulation thin filmstretched above a gap on a substrate. Temperature measuring elements, which in some

embodiments are thermopiles, are provided on both sides of the same, and an ambienttemperature measuring resistive element is provided on the top surface of the siliconsubstrate. The thermopiles in some embodiments are made of polysilicon and aluminum,and in some embodiments the polysilicon is doped with phosphorus (P). In someembodiments, the amount of phosphorus is determined such that temperature

characteristics of the thermopiles and have an absolute value substantially equal to thatof temperature characteristics attributable to factors other than the thermopiles andhave a (positive or negative) sign opposite to that of the latter. Thus, the temperaturecharacteristics of the thermopiles cancel the temperature characteristics attributable tofactors other than the thermopiles.

申请人：OMRON CORPORATION

代理机构：Rosenthal & Osha L.L.P.

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