专利名称：High-speed, high-resolution, large area
inspection using multiple optical fouriertransform cells
发明人：Lawrence Hendler,Michael P. C.
Watts,Richard A. Portune
申请号：US08/683790申请日：19960718公开号：US05966212A公开日：19991012
摘要：A system includes multiple optical Fourier transform cells which simultaneouslyscan a device under test. The illuminated area for each Fourier transform cell is small toprovide high resolution, while the number of cells is large to cover a relatively wide areaand keep inspection speed high. The advantages of optical computing performed byFourier transform optics also keeps the inspection speed high because illuminated areasare large when compared to the resolution and Fourier transforms are linear shiftinvariant so that optical measurements can be performed during scanning. In oneembodiment, Fourier transform cells are offset from each other perpendicular to thescan direction by less that the width of an illuminated area. This provides completecoverage during scanning of a device under test. Because the illumination for the Fouriertransform is collimated, the system is insensitive to focusing errors due to fluctuations inworking distance.
申请人：PIXEL SYSTEMS, INC.
代理机构：Skjerven, Morrill, MacPherson, Franklin & Friel LLP
代理人：David T. Millers
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