专利名称：Electrochemical processor发明人：Gregory J. Wilson,Paul R. McHugh申请号：US13943684申请日：20130716公开号：US09099297B2公开日：20150804
专利附图：
摘要：An electrochemical processor may include a head having a rotor configured tohold a workpiece, with the head moveable to position the rotor in a vessel. Inner andouter anodes are in inner and outer anolyte chambers within the vessel. An upper cup inthe vessel, has a curved upper surface and inner and outer catholyte chambers. A current
thief is located adjacent to the curved upper surface. Annular slots in the curved uppercurved surface connect into passageways, such as tubes, leading into the outer catholytechamber. Membranes may separate the inner and outer anolyte chambers from the innerand outer catholyte chambers, respectively.
申请人：APPLIED Materials, Inc.
地址：Santa Clara CA US
国籍：US
代理机构：Perkins Coie LLP
代理人：Kenneth H. Ohriner
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