MOTOROLASEMICONDUCTOR TECHNICAL DATAOrder this documentby MPX2100/D100 kPaOn-Chip TemperatureCompensated & CalibratedSilicon Pressure SensorsThe MPX2100 series device is a silicon piezoresistive pressure sensor providing ahighly accurate and linear voltage output — directly proportional to the applied pressure.The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–filmresistor network integrated on–chip. The chip is laser trimmed for precise span and offsetcalibration and temperature compensation.Features•Temperature Compensated Over 0°C to +85°C•Easy–to–Use Chip Carrier Package Options•Available in Absolute, Differential and Gauge Configurations•Ratiometric to Supply Voltage•±0.25% Linearity (MPX2100D)Application Examples•Pump/Motor Controllers•Robotics•Level Indicators•Medical Diagnostics•Pressure Switching•Barometers•AltimetersFigure 1 illustrates a block diagram of the internal circuitry on the stand–alonepressure sensor chip.VS3THIN FILMTEMPERATURECOMPENSATIONANDCALIBRATIONCIRCUITRY1GNDMPX2100SERIES0 to 100 kPa (0 to 14.5 psi)40 mV FULL SCALE SPAN(TYPICAL)UNIBODY PACKAGEMPX2100A/DCASE 344MPX2100AP/GPCASE 344B24SENSINGELEMENTVout+Vout-MPX2100DPCASE 344CFigure 1. Temperature Compensated Pressure Sensor SchematicVOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSUREThe differential voltage output of the sensor is directly proportional to the differentialpressure applied.The absolute sensor has a built–in reference vacuum. The output voltage will decreaseas vacuum, relative to ambient, is drawn on the pressure (P1) side.The output voltage of the differential or gauge sensor increases with increasingpressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,output voltage increases as increasing vacuum is applied to the vacuum (P2) siderelative to the pressure (P1) side.12MPX2100ASX/GSXCASE 344FPIN NUMBERGnd+Vout34VS–VoutNOTE: Pin 1 is noted by the notch inthe lead.REV 9Motorola Sensor Device Data© Motorola, Inc. 2002 1MPX2100 SERIESMAXIMUM RATINGS(NOTE)RatingMaximum Pressure (P1 > P2)Storage TemperatureOperating TemperatureSymbolPmaxTstgTAValue400–40 to +125–40 to +125UnitkPa°C°CNOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)CharacteristicPressure Range(1)Supply Voltage(2)Supply CurrentFull Scale Span(3)Offset(4)SensitivityLinearity(5)MPX2100D SeriesMPX2100A SeriesMPX2100A, MPX2100DMPX2100DMPX2100A SeriesSymbolPOPVSIoVFSSVoff∆V/∆P————TCVFSSTCVoffZinZouttR——Min0——38.5–1.0–2.0—–0.25–1.0——–1.0–1.010001400———Typ—106.040——0.4——±0.1±0.5————1.020±0.5Max10016—41.51.02.0—0.251.0——1.01.025003000———UnitkPaVdcmAdcmVmVmV/kPa%VFSS%VFSS%VFSS%VFSSmVΩΩmsms%VFSSPressure Hysteresis(5) (0 to 100 kPa)Temperature Hysteresis(5) (–40°C to +125°C)Temperature Effect on Full Scale Span(5)Temperature Effect on Offset(5)Input ImpedanceOutput ImpedanceResponse Time(6) (10% to 90%)Warm–UpOffset Stability(7)NOTES:1.1.0 kPa (kiloPascal) equals 0.145 psi.2.Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additionalerror due to device self–heating.3.Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at theminimum rated pressure.4.Offset (Voff) is defined as the output voltage at the minimum rated pressure.5.Accuracy (error budget) consists of the following:•Linearity:Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range.•Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied.•Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C.•TcSpan:Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.•TcOffset:Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relativeto 25°C.6.Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected toa specified step change in pressure.7.Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 2Motorola Sensor Device DataMPX2100 SERIESLINEARITYLinearity refers to how well a transducer’s output followsthe equation: Vout = Voff + sensitivity x P over the operatingpressure range. There are two basic methods for calculatingnonlinearity: (1) end point straight line fit (see Figure 2) or (2)a least squares best line fit. While a least squares fit givesthe “best case” linearity error (lower numerical value), thecalculations required are burdensome.Conversely, an end point fit will give the “worst case” error(often more desirable in error budget calculations) and thecalculations are more straightforward for the user. Motorola’sspecified pressure sensor linearities are based on the endpoint straight line method measured at the midrangepressure.LEAST SQUARES FITRELATIVE VOLTAGE OUTPUTEXAGGERATED PERFORMANCECURVELEASTSQUAREDEVIATIONSTRAIGHT LINEDEVIATIONEND POINTSTRAIGHT LINE FITOFFSET050PRESSURE (% FULLSCALE)100Figure 2. Linearity Specification ComparisonON–CHIP TEMPERATURE COMPENSATION and CALIBRATIONFigure 3 shows the output characteristics of the MPX2100series at 25°C. The output is directly proportional to thedifferential pressure and is essentially a straight line.The effects of temperature on Full Scale Span and Offsetare very small and are shown under Operating Characteris-tics.4035OUTPUT (mVdc)30252015105kPaPSI0-ā50VS= 10 VdcTA= 25°CP1 > P2MAXTYPSPANRANGE(TYP)MIN253.62507.257510.8710014.5OFFSET(TYP)Figure 3. Output versus Pressure DifferentialSILICONE GELDIE COATWIRE BONDDIFFERENTIAL/GAUGESTAINLESS STEELDIEMETAL COVERP1EPOXYCASESILICONE GELABSOLUTEDIE COATDIEP1WIRE BONDSTAINLESS STEELMETAL COVEREPOXYCASELEAD FRAMEDIFFERENTIAL/GAUGE ELEMENTP2DIEBONDLEAD FRAMEABSOLUTE ELEMENTP2DIEBONDFigure 4. Cross–Sectional Diagrams (Not to Scale)Figure 4 illustrates the absolute sensing configuration(right) and the differential or gauge configuration in the basicchip carrier (Case 344). A silicone gel isolates the die surfaceand wire bonds from the environment, while allowing thepressure signal to be transmitted to the silicon diaphragm.The MPX2100 series pressure sensor operating charac-teristics and internal reliability and qualification tests arebased on use of dry air as the pressure media. Media otherthan dry air may have adverse effects on sensor perfor-mance and long term reliability. Contact the factory for in-formation regarding media compatibility in your application.Motorola Sensor Device Data 3MPX2100 SERIESPRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLEMotorola designates the two sides of the pressure sensoras the Pressure (P1) side and the Vacuum (P2) side. ThePressure (P1) side is the side containing the silicone gelwhich isolates the die. The differential or gauge sensor isdesigned to operate with positive differential pressurePart NumberMPX2100AMPX2100DPMPX2100APMPX2100ASXMPX2100GPMPX2100GSXMPX2100Dapplied, P1 > P2. The absolute sensor is designed forvacuum applied to P1 side.The Pressure (P1) side may be identified by using thetable below:Case Type344 344C344B344FPressure (P1) Side IdentifierStainless Steel CapSide with Part MarkingSide with Port AttachedSide with Port AttachedORDERING INFORMATIONMPX2100 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available inthe basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hosepressure connections.MPX SeriesDevice TypeBasic ElementPorted ElementsOptionsAbsolute, DifferentialDifferential, Dual PortAbsolute, GaugeAbsolute, Gauge AxialCase Type344 344C344B344FOrder NumberMPX2100AMPX2100DMPX2100DPMPX2100APMPX2100GPMPX2100ASXMPX2100GSXDevice MarkingMPX2100AMPX2100DMPX2100DPMPX2100APMPX2100GPMPX2100AMPX2100D 4Motorola Sensor Device DataMPX2100 SERIESPACKAGE DIMENSIONSNOTES:1.DIMENSIONING AND TOLERANCING PER ASMEY14.5M, 1994.2.CONTROLLING DIMENSION: INCH.3.DIMENSION -A- IS INCLUSIVE OF THE MOLDSTOP RING. MOLD STOP RING NOT TO EXCEED16.00 (0.630).INCHESMINMAX0.5950.6300.5140.5340.2000.2200.0160.0200.0480.0640.100 BSC0.0140.0160.6950.72530 NOM_0.4750.4950.4300.4500.0480.0520.1060.118MILLIMETERSMINMAX15.1116.0013.0613.565.085.590.410.511.221.632.54 BSC0.360.4017.6518.4230 NOM_12.0712.5710.9211.431.221.322.683.00CRMB–A–NPIN 112341234ZL–T–JSEATINGPLANEDF4 PLGMFYMDAMBAR TRIM ZONE:THIS IS INCLUDEDWITHIN DIM. “F” 8 PL0.136 (0.005)TADIMABCDFGJLMNRYZSTYLE 1:PIN 1.2.3.4.GROUND+ OUTPUT+ SUPPLY- OUTPUTSTYLE 2:PIN 1.2.3.4.VCC- SUPPLY+ SUPPLYGROUNDSTYLE 3:PIN 1.2.3.4.GND-VOUTVS+VOUTCASE 344–15ISSUE ZSEATINGPLANE–T–RHNPORT #1POSITIVEPRESSURE(P1)–A–ULNOTES:1.DIMENSIONING AND TOLERANCING PER ANSIY14.5, 1982.2.CONTROLLING DIMENSION: INCH.DIMABCDFGHJKLNPQRSUINCHESMINMAX1.1451.1750.6850.7150.3050.3250.0160.0200.0480.0640.100 BSC0.1820.1940.0140.0160.6950.7250.2900.3000.4200.4400.1530.1590.1530.1590.2300.2500.2200.2400.910 BSCMILLIMETERSMINMAX29.0829.8517.4018.167.758.260.410.511.221.632.54 BSC4.624.930.360.4117.6518.427.377.6210.6711.183.894.043.894.045.846.355.596.1023.11 BSC–Q–BPIN 11234–P–0.25 (0.010)JCMKSFGD4 PL0.13 (0.005)TQSMTSSQSSTYLE 1:PIN 1.2.3.4.GROUND+ OUTPUT+ SUPPLY- OUTPUTCASE 344B–01ISSUE BMotorola Sensor Device Data 5MPX2100 SERIESPACKAGE DIMENSIONS — CONTINUEDVRPORT #2PORT #1–A–UWHPORT #2VACUUM(P2)LPORT #1POSITIVE PRESSURE(P1)NOTES:1.DIMENSIONING AND TOLERANCING PER ANSIY14.5M, 1982.2.CONTROLLING DIMENSION: INCH.DIMABCDFGHJKLNPQRSUVWINCHESMINMAX1.1451.1750.6850.7150.4050.4350.0160.0200.0480.0640.100 BSC0.1820.1940.0140.0160.6950.7250.2900.3000.4200.4400.1530.1590.1530.1590.0630.0830.2200.2400.910 BSC0.2480.2780.3100.330MILLIMETERSMINMAX29.0829.8517.4018.1610.2911.050.410.511.221.632.54 BSC4.624.930.360.4117.6518.427.377.6210.6711.183.894.043.894.041.602.115.596.1023.11 BSC6.307.067.878.38N–Q–SEATINGPLANEBSEATINGPLANEPIN 11234–P––T–JC0.13 (0.005)MKS–T–0.25 (0.010)MTQSFGD4 PLTSSQSCASE 344C–01ISSUE BSTYLE 1:PIN 1.2.3.4.GROUND+ OUTPUT+ SUPPLY- OUTPUT–T–CEAU–Q–NOTES:1.DIMENSIONING AND TOLERANCING PERANSI Y14.5M, 1982.2.CONTROLLING DIMENSION: INCH.DIMABCDEFGJKNPQRSUVINCHESMINMAX1.0801.1200.7400.7600.6300.6500.0160.0200.1600.1800.0480.0640.100 BSC0.0140.0160.2200.2400.0700.0800.1500.1600.1500.1600.4400.4600.6950.7250.8400.8600.1820.194MILLIMETERSMINMAX27.4328.4518.8019.3016.0016.510.410.514.064.571.221.632.54 BSC0.360.415.596.101.782.033.814.063.814.0611.1811.6817.6518.4221.3421.844.624.92VNRPORT #1POSITIVEPRESSURE(P1)B–P–0.25 (0.010)MPIN 1TQM4321SKJFD4 PL0.13 (0.005)GTPQSTYLE 1:PIN 1.2.3.4.GROUNDV (+) OUTV SUPPLYV (-) OUTMSSCASE 344F–01ISSUE B 6Motorola Sensor Device DataMPX2100 SERIES
NOTES
Motorola Sensor Device Data 7
MPX2100 SERIESMotorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regardingthe suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit,and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in differentapplications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application bycustomer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed,intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life,or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchaseor use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees,subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly orindirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligentregarding the design or manufacture of the part. Motorola and the Stylized M Logo are registered trademarks of Motorola, Inc. Motorola, Inc. is an EqualOpportunity/Affirmative Action Employer.MOTOROLA and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respectiveowners.E Motorola, Inc. 2002.How to reach us:USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1–303–675–2140 or 1–800–441–2447JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3–20–1, Minami–Azabu. Minato–ku, Tokyo 106–8573 Japan. 81–3–3440–3569ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 852–26668334Technical Information Center: 1–800–521–6274HOME PAGE: http://www.motorola.com/semiconductors/ 8◊Motorola Sensor Device DataMPX2100/D