MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SA

专利名称：MEMS MICROPHONE AND METHOD OF

MANUFACTURING THE SAME

发明人：Jong Won SUN,Han Choon LEE申请号：US15497366申请日：20170426

公开号：US20170311088A1公开日：20171026

专利附图：

摘要：A MEMS microphone includes a substrate having a cavity, a back plate disposedover the substrate and having a plurality of acoustic holes, a diaphragm disposed

between the substrate and the back plate, and an anchor extending from a circumference

of the diaphragm to be connected with an end portion of the diaphragm. The diaphragmis spaced apart from the substrate and the back plate to covers the cavity, and thediaphragm senses an acoustic pressure to generate a displacement. The anchor extendsfrom a circumference of the diaphragm to be connected with an end portion of thediaphragm, and is connected with the substrate to support the diaphragm. Thus, theMEMS microphone can prevent a portion of an insulation layer located around the anchorfrom remaining and can prevent a buckling phenomenon of the diaphragm fromoccurring.

申请人：DONGBU HITEK CO., LTD.

地址：Seoul KR

国籍：KR

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