专利名称：Substrate processing apparatus and method
of transporting substrates and method ofprocessing substrates in substrateprocessing apparatus
发明人：Kenji Hashinoki,Yasufumi Koyama,Takaharu
Yamada
申请号：US10769390申请日：20040130
公开号：US20040182318A1公开日：20040923
专利附图：
摘要：A substrate processing apparatus includes a plurality of cells each including apredetermined processing unit, a transport mechanism, and a cell controller. The cellcontroller independently controls operations in each cell in accordance with transportsetting and processing condition setting for each cell described in recipe datadetermined for each substrate unit to be processed. Because the processing andtransport are performed independently of the operations of adjacent cells, substratesbelonging to different substrate units are received through a feed inlet or the samesubstrate inlet, are processed while being present in the same cell, and are transportedto a feed outlet and a return outlet which are different substrate outlets. This allows thepresence of different process flows in parallel.
申请人：DAINIPPON SCREEN MFG. CO., LTD.
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