Device for measuring the temperature of a sample

专利名称：Device for measuring the temperature of a

sample

发明人：DAVIET, JEAN-FRANCOIS,LASSAGNE,

PIERRE,MONTMAYEUL, PHILIPPE,PECCOUD,LOUISE

申请号：EP92402981.2申请日：19921104公开号：EP0541438A1公开日：19930512

专利附图：

摘要：The invention relates to a device for measuring the temperature, in particular of

a substrate. This device comprises two optical fibres: an upper fibre (5) which can bemoved, and a lower fibre (6), which are arranged in the extension of each other and areseparated from each other by a gap (7). These optical fibres are suitable for conveying afirst light signal, sent by a light source to an excitable element (8) located at the end (5a)of the upper fibre, and a second light signal returned by the excitable element (8) to ananalysis device. Furthermore, the invention comprises elastic means (9, 10) mounted onthe upper fibre for ensuring constant-pressure contact between the substrate and theexcitable element. It also comprises means (11) for adjusting the pressure of the saidcontact, and means (15) for altering the gap between the two fibres. The inventionapplies to microelectronics, for deposition, etching or any other surface treatment.

申请人：COMMISSARIAT A L'ENERGIE ATOMIQUE

地址：31-33, RUE DE LA FEDERATION; F-75015 PARIS,31-33, rue de la Fédération F-75015 Paris FR

国籍：FR

代理机构：Signore, Robert

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