Illumination optical system

专利名称：Illumination optical system发明人：Masato Shibuya申请号：US08/317994申请日：19941004公开号：US05535054A公开日：19960709

摘要：An illumination optical system for supplying polarized illumination light to anobject to be illuminated. The light from a light source is separated by a polarizing beamsplitter into a first polarized light component as the illumination light and a secondpolarized light component which is different in polarizing direction from the firstpolarized light component. A first reflecting optical member for returning the secondpolarized light component to the light source side and a converging optical system arearranged in such a manner that a light source image due to the backward light from thefirst reflecting optical member is formed at a position apart from the light source in adirection substantially perpendicular to the optical axis of the converging optical system.The backward light is converted by a polarizing element to a polarized light of the samepolarizing direction as the first polarized light component and it is again emitted fromthe polarizing beam splitter at an optical axis position adjacent to the first polarized lightcomponent.

申请人：NIKON CORPORATION

代理人：Michael N. Meller

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