专利名称：Apparatus and method for heating
substrates
发明人：Jun Zhao,David Quach,Timothy Weidman,Rick
J. Roberts,Farhad Moghadam,Dan Maydan
申请号：US11445630申请日：20060602
公开号：US20060223233A1公开日：20061005
专利附图：
摘要：An apparatus for processing substrates is disclosed. In one embodiment, theapparatus includes a housing and a plurality of stacked cell structures in the housing. An
actuator is adapted to move the plurality of stacked cell structures inside of the housingwhile substrates in the stacked cell structures are being heated.
申请人：Jun Zhao,David Quach,Timothy Weidman,Rick J. Roberts,FarhadMoghadam,Dan Maydan
地址：Cupertino CA US,San Jose CA US,Sunnyvale CA US,Sunnyvale CA US,Saratoga CAUS,Los Altos Hills CA US
国籍：US,US,US,US,US,US
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