专利名称:High-voltage bipolar-CMOS-DMOS
integrated circuit devices and modularmethods of forming the same
发明人:Richard K. Williams,Donald Ray Disney申请号:US11982793申请日:20071105
公开号:US20080061368A1公开日:20080313
专利附图:
摘要:All low-temperature processes are used to fabricate a variety of semiconductordevices in a substrate the does not include an epitaxial layer. The devices include a non-
isolated lateral DMOS, a non-isolated extended drain or drifted MOS device, a lateraltrench DMOS, an isolated lateral DMOS, JFET and depletion-mode devices, and P-N diodeclamps and rectifiers and junction terminations. Since the processes eliminate the needfor high temperature processing and employ “as-implanted” dopant profiles, theyconstitute a modular architecture which allows devices to be added or omitted to the ICwithout the necessity of altering the processes used to produce the remaining devices.
申请人:Richard K. Williams,Donald Ray Disney
地址:Cupertino CA US,Cupertino CA US
国籍:US,US
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