专利名称:Method of growing silicon single crystals发明人:Murai, Toshinari,Iino, Eiichi,Arai,
Hideo,Fusegawa, Izumi, Haranaka-shataku308,Yamagishi, Hirotoshi
申请号:EP95301338.0申请日:19950302公开号:EP0671491A1公开日:19950913
专利附图:
摘要:Array
申请人:SHIN-ETSU HANDOTAI COMPANY LIMITED
地址:4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo JP
国籍:JP
代理机构:Whalley, Kevin
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