APPARATUS AND METHOD FOR INVESTIGATING A SAMPLE

专利名称：APPARATUS AND METHOD FOR

INVESTIGATING A SAMPLE

发明人：COLE, Bryan Edward,Teraview

Limited,ARNONE, Donald Dominic,TeraviewLimited,CLUFF, Julian,Teraview Limited

申请号：EP02732144.7申请日：20020116公开号：EP1352287A2公开日：20031015

摘要：A sample (7) is investigated using a beam of radiation from a source (1), adetector (2) for detecting the radiation reflected or transmitted by the sample, an opticalsystem (3) for manipulating the radiation beam, and means for translating the opticalsystem along an axis (6) to scan the beam across the sample, wherein the source anddetector are on opposite sides of the optical system, and the beam (4) entering theoptical system and the beam (5) leaving the optical system are both parallel to thetranslation axis (6). The optical system may also be translated in an orthogonal directionfor imaging the sample. In alternative arrangements, a reference beam may be directedinto the optical system which may carry the detector. The sample may be irradiatedthrough a transparent member and signals obtained with and without the samplepresent subtracted. The sample may be irradiated with pulsed radiation and a Fouriertransform applied to the detected signal. The sample may be irradiated using anoptically active element having two interfaces.

申请人：Teraview Limited

地址：302/304 Cambridge Science Park,Milton Road Cambridge CB4 0WG GB

国籍：GB

代理机构：Granleese, Rhian Jane

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