专利名称：Method and apparatus for stabilizing optical
dielectric coatings
发明人：Robert J. Rafac,Alexei Lukashev,Weiman
Zhang Kevin
申请号：US10608521申请日：20030626
公开号：US20050008789A1公开日：20050113
专利附图：
摘要：A method for stabilizing a multi-layered dielectric reflectivity coating subject tocompaction/densification upon exposure to DUV or shorter wavelength light, is disclosed
which may comprise: applying the reflectivity coating to a reflective surface forming acoating bulk on the surface; exposing the coating bulk to a pretreatment of a sufficientamount of DUV radiation to induce sufficient densification in enough of the coating bulkto inhibit subsequent densification during continued exposure to DUV or shorterwavelength radiation. The method may also comprise the pretreatment radiationexposure amounting to energy of at least the equivalent of about 2 Bp at 9 mJ per pulse.The method may also comprise the pretreatment radiation exposure amounting theenergy being delivered in at about 3 KHz pulse repetition rate. The method may alsocomprise the pretreatment radiation exposure amounts to energy of at least theequivalent of 15-18 mJ per pulse delivered over about 700 M-1 B pulses, i.e., about 4days at 3 Khz or 2-3 days at 4 Khz pulse rates.
申请人：Robert J. Rafac,Alexei Lukashev,Weiman Zhang Kevin
地址：Carlsbad CA US,San Diego CA US,San Diego CA US
国籍：US,US,US
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